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Microbeam analysis. Analytical electron microscopy. Methods for calibrating image magnification by using reference materials with periodic structures

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Microbeam analysis. Analytical electron microscopy. Methods for calibrating image magnification by using reference materials with periodic structures1 Scope This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super lattice structure of semiconductor or an analysing crystal for X ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the

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