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Production equipment for microsystems. Interface between end effector and handling system
Description
Production equipment for microsystems. Interface between end effector and handling system1 Scope This International Standard specifies provisions for the interface between end effector and handling systems in production equipment for microsystems. It specifies principal deviations, tolerances and designations for manually and automatically changeable end effectors. The aim is to specify the end effector interface in three levels with an increasing degree of specification.
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