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Surface chemical analysis. X-ray photoelectron spectrometers. Calibration of energy scales
Description
Surface chemical analysis. X-ray photoelectron spectrometers. Calibration of energy scales1 Scope This International Standard specifies a method for calibrating the binding energy scales of X ray photoelectron spectrometers, for general analytical purposes, using unmonochromated Al or Mg X rays or monochromated Al X rays. It is only applicable to instruments which incorporate an ion gun for sputter cleaning. This International Standard further specifies a method to establish a calibration schedule, to test for the binding energy scale
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